奈米壓印 Nano Imprint

晶圓鍵合/解鍵合 Wafer Bond / De-bond

LAB (Laser Assisted Bonding )

Foup Cleaner (Class 1)清洗設備

材料 Materials

真空部件

雷射保護液

撥水材料

UV膠

PDMS/矽橡膠

客製化設備 Customize Equipment