洺宙股份有限公司
Modern generation global Co., Ltd .

Foup/Pod 卡匣清洗機

Foup/Pod
規格 Specifications
Model MG-800-W/S
Configuration Max: 6 FOUPs / 6 Frame Cassette Magazine (12") / 6 Black Cassette 8" (Option 12 Black Cassette 8") by Fixture
UPH 12 Sets/Hr (6Sets/Run/30min)
18 Sets/Hr (6Sets/Run/20min)
Direction Rotate Clockwise or Anti-clockwise
Loading Manual by Operator
Speed 200 rpm to 250 rpm
Noise Level < 70 dB
Working Height 1050 mm (Cassette Load / Unload Position)
Operator Single
Environment 15–40°C, RH < 80%
Facility Requirements DIW @ 5–60 L/Min
Power Consumption Max. 50 KVA, 220 Vac, 3 Phase, 50/60 Hz
Dimensions 1600 mm(W) × 1850 mm(D) × 2600 mm(H)
Interface Control PLC + PC
Weight 2000 Kg

性能 Performance