| 規格 Specifications | |
|---|---|
| Model | MG-800-W/S |
| Configuration | Max: 6 FOUPs / 6 Frame Cassette Magazine (12") / 6 Black Cassette 8" (Option 12 Black Cassette 8") by Fixture |
| UPH |
12 Sets/Hr (6Sets/Run/30min) 18 Sets/Hr (6Sets/Run/20min) |
| Direction | Rotate Clockwise or Anti-clockwise |
| Loading | Manual by Operator |
| Speed | 200 rpm to 250 rpm |
| Noise Level | < 70 dB |
| Working Height | 1050 mm (Cassette Load / Unload Position) |
| Operator | Single |
| Environment | 15–40°C, RH < 80% |
| Facility Requirements | DIW @ 5–60 L/Min |
| Power Consumption | Max. 50 KVA, 220 Vac, 3 Phase, 50/60 Hz |
| Dimensions | 1600 mm(W) × 1850 mm(D) × 2600 mm(H) |
| Interface Control | PLC + PC |
| Weight | 2000 Kg |
性能 Performance